The LEO 1530 is a state-of-the-art scanning electron microscope (SEM) that uses a Schottky-type field-emission electron source. A beam booster is used to maintain optimum electron optical performance at all accelerating voltages. In addition, the patented Gemini optical column has no crossovers and utilizes a magnetic/electrostatic objective lens for outstanding imaging capabilities, especially at low voltage (due to reduced chromatic aberration).
EquipmentSecondary Electron Detectors (SE)
Backscattered Electron Detector (BSE)
Energy Dispersive Analysis System (EDS)
Electron Backscattered Kikuchi Pattern Detector (EBKP)
Performance SpecificationsSuperb image resolution
Designed to perform EDS analysis, BSE imaging and high resolution SE imaging
EDS system has a state-of-the-art detector
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